中文簡介

《微電子工程》擁有開放獲取的鏡像期刊《微納工程》，目標(biāo)和范圍相同，編輯團(tuán)隊(duì)、投稿系統(tǒng)和嚴(yán)格的同行評審。《微電子工程》是一本以電子、光子、生物電子、機(jī)電和流體設(shè)備及系統(tǒng)的制造為主要內(nèi)容的納米加工和納米技術(shù)期刊。它還涵蓋了“超過摩爾”和“超越摩爾”集成納米電子/光子學(xué)和微/納米/生物系統(tǒng)的不斷擴(kuò)展的跨學(xué)科領(lǐng)域。通過其獨(dú)特的混合同行評審文章，評論，加速出版物，簡短和技術(shù)說明，以及最新的研究新聞的關(guān)鍵發(fā)展，微電子工程提供了這一令人興奮的，跨學(xué)科的和動態(tài)的學(xué)術(shù)界和工業(yè)界的研究人員的新領(lǐng)域的全面報道。該雜志涉及以下主題，并考慮的主要是實(shí)驗(yàn)工作，或理論/模擬工作直接聯(lián)系和支持該領(lǐng)域的實(shí)驗(yàn):微電子加工與材料(光刻、自組裝、等離子體加工、金屬化、3D集成、相關(guān)材料等)微/納米工程/制造/技術(shù)/制造納米電子和光子器件及其制備微系統(tǒng)、微器件(如傳感器和納米能源器件)及其制造微流體、生命科學(xué)設(shè)備/傳感器，以及集成芯片實(shí)驗(yàn)室及其制造

　　英文簡介

Microelectronic Engineering has an open access mirror journal Micro and Nano Engineering, sharing the same aims and scope, editorial team, submission system and rigorous peer review.Microelectronic Engineering is the premier nanoprocessing, and nanotechnology journal focusing on fabrication of electronic, photonic, bioelectronic, electromechanic and fluidic devices and systems, and their applications in the broad areas of electronics, photonics, energy, life sciences, and environment. It covers also the expanding interdisciplinary field of "more than Moore" and "beyond Moore" integrated nanoelectronics / photonics and micro-/nano-/bio-systems. Through its unique mixture of peer-reviewed articles, reviews, accelerated publications, short and Technical notes, and the latest research news on key developments, Microelectronic Engineering provides comprehensive coverage of this exciting, interdisciplinary and dynamic new field for researchers in academia and professionals in industry.The journal addresses the following topics and considers mostly experimental work, or theoretical / simulation work directly linked and supporting experiments in the fields:Microelectronics processing & materials (Lithography, Self-assembly, Plasma Processing, Metallization, 3D Integration, Related Materials….)Micro-/Nano-engineering / fabrication / technology / manufacturingNanoelectronic and photonic devices and their fabricationMicrosystems, microdevices (e.g., sensors and nanoenergy devices) and their fabricationMicrofluidics, life science devices /sensors, as well as integrated Lab-on-a-chip and their fabrication

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