中文簡介

《微納米光刻機(jī)MEMS和MOEMS雜志》（JM3）發(fā)表了有關(guān)光刻、制造、包裝和集成技術(shù)的科學(xué)、發(fā)展和實踐的論文，以滿足電子、MEMS、MOEMS和光子學(xué)行業(yè)的需要。這類裝置的范圍很廣，包括生物醫(yī)學(xué)微裝置、微流體、傳感器和執(zhí)行器、自適應(yīng)光學(xué)和數(shù)字微鏡。范圍廣泛，有助于促進(jìn)期刊服務(wù)的社區(qū)之間的協(xié)同作用和利益。

　　英文簡介

The Journal of Micro-Nanolithography MEMS and MOEMS (JM3) publishes papers on the science, development, and practice of lithographic, fabrication, packaging, and integration technologies necessary to address the needs of the electronics, MEMS, MOEMS, and photonics industries. The wide range of such devices includes biomedical microdevices, microfluidics, sensors and actuators, adaptive optics, and digital micromirrors. The scope is broad to facilitate synergy and interest between the communities served by the journal.

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